In this study new hybrid organic-inorganic TiO2 sol-gel materials with high TiO2 content (more than 50% respect silicon dioxide (SiO2) content) are synthesized, characterized and micro-/nano-patterned using thermal nanoimprint lithography.

New organic-inorganic sol-gel resists for micro and nanoimprinting

Savegnago, Agnese Virginia
2011/2012

Abstract

In this study new hybrid organic-inorganic TiO2 sol-gel materials with high TiO2 content (more than 50% respect silicon dioxide (SiO2) content) are synthesized, characterized and micro-/nano-patterned using thermal nanoimprint lithography.
Scuola di Ingegneria
INGEGNERIA DEI MATERIALI
2011-03-22
119
nanoimprint lithography, titanium dioxide
Auzelyte, Vaida
Lauree magistrali
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.12608/14713