The aim of this study is to investigate the potentiality of an HiPIMS reactive process with two gases, evaluating the process control and the properties of the deposited coatings compared to DCMagnetron Sputtering. TiCN(H) nano-composite films have been deposited in a CFUBMS apparatus and HiPIMS generator. Coatings have been characterized from compositional, microstructural as well as mechanical and tribological point of view
Synthesis and characterization of titanium carbon nitride films by High Power Impulse Magnetron Sputtering
Grigoletto, Silvia
2014/2015
Abstract
The aim of this study is to investigate the potentiality of an HiPIMS reactive process with two gases, evaluating the process control and the properties of the deposited coatings compared to DCMagnetron Sputtering. TiCN(H) nano-composite films have been deposited in a CFUBMS apparatus and HiPIMS generator. Coatings have been characterized from compositional, microstructural as well as mechanical and tribological point of viewFile in questo prodotto:
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Utilizza questo identificativo per citare o creare un link a questo documento:
https://hdl.handle.net/20.500.12608/17868