Laser Trimming of Silicon Nitride Racetrack Resonators

A novel technique for rapidly trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators has been presented. The resonant wavelength of fabricated devices can be tuned to any point within a free spectral range by exposing them to an ultraviolet laser. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.