In recent years, automatic anomaly detection techniques have been widely used in industrial manufacturing. In this thesis, the aim was to classify a specific type of defect (corrosion) in a dataset related to semiconductor manufacturing. Due to the limited amount of images available, I approached the problem in a semi-supervised environment using common anomaly detection methods. In the end, I came up with a completely new method for classifying defects in images.

Defect Classification in Semiconductor Manufacturing Images: A Novel Weakly Supervised Approach

GROTTO, GIONATA
2023/2024

Abstract

In recent years, automatic anomaly detection techniques have been widely used in industrial manufacturing. In this thesis, the aim was to classify a specific type of defect (corrosion) in a dataset related to semiconductor manufacturing. Due to the limited amount of images available, I approached the problem in a semi-supervised environment using common anomaly detection methods. In the end, I came up with a completely new method for classifying defects in images.
2023
Defect Classification in Semiconductor Manufacturing Images: A Novel Weakly Supervised Approach
Classification
Semiconductor
Deep Learning
Anomaly detection
Feature extraction
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/20.500.12608/66482