This work focuses on extending the fractional bandwidth (FBW) and enhancing the thermal stability of air-coupled Piezoelectric Micromachined Ultrasonic Transducers (pMUTs). The approach involves the introduction of a Parylene-C polymer layer for mechanical damping, which successfully doubles the FBW while balancing the trade-off with mechanical transmission sensitivity, crucial for efficient transceiver functionality in pMUT arrays. Additionally, an annealing process was developed to stabilize the polymer’s mechanical properties, effectively increasing thermal stability up to 100°C. Further comprehensive insights were gained through equivalent circuit model analyses, which quantitatively described the mechanical and electrical behaviors of the pMUT devices. This allowed to confirm experimentally the theoretical models for viscoelastic damping layers proposed by Oberst, demonstrating that polymers with higher elastic modulus and loss factor are more effective for damping. A complete comprehension of the polymer requirements for damping was achieved, and other polymers are also presented as potential candidates for coating pMUT devices.
This work focuses on extending the fractional bandwidth (FBW) and enhancing the thermal stability of air-coupled Piezoelectric Micromachined Ultrasonic Transducers (pMUTs). The approach involves the introduction of a Parylene-C polymer layer for mechanical damping, which successfully doubles the FBW while balancing the trade-off with mechanical transmission sensitivity, crucial for efficient transceiver functionality in pMUT arrays. Additionally, an annealing process was developed to stabilize the polymer’s mechanical properties, effectively increasing thermal stability up to 100°C. Further comprehensive insights were gained through equivalent circuit model analyses, which quantitatively described the mechanical and electrical behaviors of the pMUT devices. This allowed to confirm experimentally the theoretical models for viscoelastic damping layers proposed by Oberst, demonstrating that polymers with higher elastic modulus and loss factor are more effective for damping. A complete comprehension of the polymer requirements for damping was achieved, and other polymers are also presented as potential candidates for coating pMUT devices.
Effects of polymer integration on piezoelectric micromachined ultrasonic transducers
ROSA, ALVARO JULIAN
2023/2024
Abstract
This work focuses on extending the fractional bandwidth (FBW) and enhancing the thermal stability of air-coupled Piezoelectric Micromachined Ultrasonic Transducers (pMUTs). The approach involves the introduction of a Parylene-C polymer layer for mechanical damping, which successfully doubles the FBW while balancing the trade-off with mechanical transmission sensitivity, crucial for efficient transceiver functionality in pMUT arrays. Additionally, an annealing process was developed to stabilize the polymer’s mechanical properties, effectively increasing thermal stability up to 100°C. Further comprehensive insights were gained through equivalent circuit model analyses, which quantitatively described the mechanical and electrical behaviors of the pMUT devices. This allowed to confirm experimentally the theoretical models for viscoelastic damping layers proposed by Oberst, demonstrating that polymers with higher elastic modulus and loss factor are more effective for damping. A complete comprehension of the polymer requirements for damping was achieved, and other polymers are also presented as potential candidates for coating pMUT devices.File | Dimensione | Formato | |
---|---|---|---|
Rosa_Alvaro.pdf
embargo fino al 07/06/2026
Dimensione
7.48 MB
Formato
Adobe PDF
|
7.48 MB | Adobe PDF |
The text of this website © Università degli studi di Padova. Full Text are published under a non-exclusive license. Metadata are under a CC0 License
https://hdl.handle.net/20.500.12608/78311