This thesis is focused on the development of compliant nano-positioning system. The mechanical design is presented and each component is thoroughly described. The control algorithm developed is based on a PID feedback position control and a force feedforward control. This thesis focuses on 3 achievements. First, improvement of the closed-loop control taking into account the nonlinearities. Secondly, the dynamic behavior has been analyzed. Finally, the cross-axis coupling has been examined.
Wide Range Control and Performance Evaluation of a Single-Axis Compliant Nano-Positioning System
Marchi, Aldo
2019/2020
Abstract
This thesis is focused on the development of compliant nano-positioning system. The mechanical design is presented and each component is thoroughly described. The control algorithm developed is based on a PID feedback position control and a force feedforward control. This thesis focuses on 3 achievements. First, improvement of the closed-loop control taking into account the nonlinearities. Secondly, the dynamic behavior has been analyzed. Finally, the cross-axis coupling has been examined.File in questo prodotto:
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Utilizza questo identificativo per citare o creare un link a questo documento:
https://hdl.handle.net/20.500.12608/27746